Master in Micro and Nano Systems

This four-semester Master's programme in Micro and Nano Systems covers design, manufacturing, characterisation, and integration of miniaturised components into engineering systems. The curriculum is interdisciplinary, drawing on fundamental theoretical knowledge in physics and engineering alongside application-oriented skills in developing electronic and micromechanical semiconductor components. Compulsory modules span semiconductor physics, microsystems design, advanced integrated circuit technology, smart sensor systems, materials science, and reliability of micro and nano systems. Students also complete a research project in the third semester and a Master's thesis in the fourth. Elective modules allow students to extend their focus into areas such as optoelectronics, power semiconductor devices, flexible electronics, microscopy at the nanoscale, automotive sensor systems, and modern battery materials. Practical laboratory work runs alongside lectures throughout the programme. Entry is possible in either the winter or summer semester. The programme is directed at graduates with a background in electrical engineering and information technology, whether they hold a BSc from Chemnitz University of Technology itself or an equivalent degree from another institution. It is suited to those aiming to enter industry or academia in the field of miniaturised systems. The programme is offered entirely in English at Chemnitz University of Technology in Chemnitz, Germany.